HV-VCST Series Thin Film Deposition Systems are varsatile Coating Tools that can be built in wide variety of configurations to satisfy almost all requirements.
HV-VCST100 is a Vacuum Deposition System and is one of the most advanced Hybrid Deposition Systems.
Our system is the most improved system in the world and has following technical details:
- Two cathode magnetron with 3 degree of freedom adjustment.
- DC power supply with automatic matching box.
- Thermal evaporation platform with 300 A current.
- Boat holder and current display.
- Double layers water cooled vacuum chamber.
- Turbo molecular pump for high vacuum.
- Backup rotary pump.
- Smart valve for turbo pump with touch screen monitor.
- Electro pneumatic valves.
- Crystal thickness monitor with 1nm resolution and 4 sensor holder.
- Substrate holder with electronic shutter and electronic feedthrough four Magnetron .
- Two stage backup rotary pump.
- Smart valve for turbo pump.Touch screen interface.
- Quartz crystal thickness monitor with 1 nm resolution and 4 sensor holder.